---
title: Inline Refractive Index vs. Auto Titration
description: This technical report demonstrates the advantages of inline refractive index vs auto-titration in qualifying H2O2 concentration in CMP of tungsten.
---

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# Reliable and Repeatable Auto-Titration Alternative Reduces Yield Loss

![Inline Refractive Index Replaces Auto-Titration in Qualifying H2O2 Concentration In CMP of Tungsten](https://info.cpsgrp.com/hs-fs/hubfs/CPSGrp_Feb2017/_Home/5%20PCO%20%26%203D%20cover%20images/Inline%20Refractive%20Index%20Replaces%20Auto-Titration%20in%20Qualifying%20H2O2%20Concentration%20In%20CMP%20of%20Tungsten.png?width=597&name=Inline%20Refractive%20Index%20Replaces%20Auto-Titration%20in%20Qualifying%20H2O2%20Concentration%20In%20CMP%20of%20Tungsten.png "Inline Refractive Index Replaces Auto-Titration in Qualifying H2O2 Concentration In CMP of Tungsten")

**Discover how inline refractive index replaces auto-titration in qualifying H2O2 concentration in CMP.**

**DFS **provides sophisticated cost-effective liquid and gas blending and distribution systems that **reduce installation and qualification time by up to 30%**.

This technical report demonstrates how inline refractive index, a continuous non-slurry-consuming measurement, helps fabs identify slurry composition faults quickly, reducing the number of wafers at risk!

**To access your copy, please complete this form.**

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