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Reliable and Repeatable Auto-Titration Alternative Reduces Yield Loss

Inline Refractive Index Replaces Auto-Titration in Qualifying H2O2 Concentration In CMP of Tungsten

Discover how inline refractive index replaces auto-titration in qualifying H2O2 concentration in CMP.

DFS provides sophisticated cost-effective liquid and gas blending and distribution systems that reduce installation and qualification time by up to 30%.

This technical report demonstrates how inline refractive index, a continuous non-slurry-consuming measurement, helps fabs identify slurry composition faults quickly, reducing the number of wafers at risk!

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